субж : english only :idea:
msn-cnet.com.com/2300-1006_3-6030916-1.html?tag=ne.gall.pg
.....Intel is considering using immersion lithography for 32-nanometer chips, which will come out in 2009. According to Intel, Extreme Ultraviolet lithography (EUV) is "more likely for 22-nanometer" manufacturing, which starts in 2011.
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